SEM Performance sub 3 nm
SEM image of Au islands on Carbon. Ultimate resolution below 3 nm at 15 keV.
Line profile showing 2.3 nm resolution. Spot size defined as the 20%-80% width of a step edge.

 
This result has been obtained with :
MULTISCAN LAB
UHV Gemini Column
NanoSAM Lab

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In-situ SPM/SEM/SAM Solutions
Aluminium/Tungsten dendrites Aluminium/Tungsten dendrites
SEM-assisted STM-tip Approach SEM-assisted STM-tip Approach
Elemental map - Ag film on Cu Elemental map - Ag film on Cu
High performance STM High performance STM
Cross- sectional STM & SEM on GaAs Multilayers Cross- sectional STM & SEM on GaAs Multilayers
Coloured SEM images Coloured SEM images
SEM in UHV on Insulators SEM in UHV on Insulators
SEM Performance sub 3 nm SEM Performance sub 3 nm
Diamond growth on Diamant substrate Diamond growth on Diamant substrate
Scanning Electron Microscopy with Polarisation Analysis Scanning Electron Microscopy with Polarisation Analysis
Electrical contact melting on nanoscale Electrical contact melting on nanoscale
Test pattern Test pattern
Writing patterns with FIB Writing patterns with FIB
Panorama View with UHV Gemini Column and External SED Panorama View with UHV Gemini Column and External SED
Writing image Patterns with FIB Writing image Patterns with FIB
Inner-Tube Chirality Determination for Double-Walled Carbon Nanotubes by Scanning Tunneling Microscopy Inner-Tube Chirality Determination for Double-Walled Carbon Nanotubes by Scanning Tunneling Microscopy
Ultimate Nanoprobe Ultimate Nanoprobe
STM Performance on Gold at Low Temperatures STM Performance on Gold at Low Temperatures
4 Probe measurements on 4 Probe measurements on "lifted" nanowires
Low current STM Low current STM
4 Probe with SEM Navigation 4 Probe with SEM Navigation
SAM Performance sub 10 nm SAM Performance sub 10 nm