The in-situ combination of STM, SEM and SAM for high resolution structural and chemical analysis creates a superior research tool. Atomic resolution STM is ideally complemented by the abilities of the SEM to image large surface areas, help to identify areas of interest, and finally assist the precise positioning of the STM tip to the desired spot on the surface.
The MULTISCAN LAB employs the goniometer mounted MULTISCAN STM as an ideal base for such dedicated experiments. The highly stable UHV chamber (30mm wall thickness) together with a rigid system frame and vibration isolation by a pneumatic auto-levelling damping system ensures both optimal STM and SEM performance.
The hydrocarbon free UHV environment is a prerequisite for the use of SEM on nano-structures, since it avoids beam-induced carbon formation on sensitive sample surfaces. Various SEM sources can be integrated into the highly stable system: As leading edge instrumentation, the UHV Gemini Column is capable for highest resolution at extremely low beam energies and high beam currents. Alternatively, the SEM 20, SEM 250, SEM 500, and SEM 1000 sources cover the range of requirements from high resolution SEM to cost-effective mid-range resolution SEM.
The use of other surface analysis techniques at the very same sample area gains complementary information about the sample properties. The flexible chamber design allows for the use of a wide range of additional detectors such as the NanoSAM analyser for ultimate SAM resolution or EDX/WDX, and SEMPA (Scanning Electron Microscopy with Polarisation Analysis).
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