View from the side onto the analysis chamber; configuration: LEED/AES, Electron Analyzer Sphera 7/1, DAR400 X-Ray gun, HIS13 UV excitation source, ISE100 sputter gun with scanning option.
Very left: connection to existing CVD system
Side view; left: analysis system, right: independant VT-AFM25 System
Side view; left: independant VT-AFM25 System, right: research MBE type preparation chamber for thin film deposition, configuration: ISE5, 2xEFM3
